Senior Equipment Engineer - Dry Strip (Etch)

Key Responsibilities

1. Equipment Ownership & Uptime

• Serve as primary owner for assigned tools, such as Trymax, Axcelis, Mattson tools
• Maintain and continuously improve OEE , MTBF , and MTTR targets.
• Develop and maintain equipment health monitoring and baseline control (SPC, FDC, fault codes, alarms).
• Drive daily tool performance reviews , documenting issues, actions, and recovery plans.

2. Maintenance & Troubleshooting

• Plan, execute, and optimize preventive maintenance (PM) activities according to OEM recommendations and fab strategies.
• Perform complex troubleshooting on electrical, mechanical, vacuum, RF, gas delivery, and software subsystems.
• Lead root cause analysis (RCA) for chronic and high‑impact issues using structured methods (8D, Fishbone, 5‑Why, etc.).
• Coordinate and supervise vendor field service engineers (FSEs) and/or contractors during major interventions, upgrades, and rebuilds.

3. Process / Equipment Interaction

• Work closely with process engineering to ensure equipment performance supports CD, profile, uniformity, selectivity, and defectivity requirements.
• Analyze tool logs, SPC charts, metrology data, and wafer maps to correlate equipment conditions with yield and parametric performance.
• Support process qualifications , chamber swaps , hardware changes , and recipe releases .

4. Continuous Improvement & Cost Reduction

• Identify and implement improvement projects to increase uptime, extend parts lifetime, and reduce operating cost.
• Optimize consumables usage and spare parts strategy (buffer stock, repair vs. replace, refurbishment plans).
• Participate in or lead CIP / Lean / Six Sigma projects for productivity and quality enhancement.
• Support capacity upgrades (chamber additions, throughput improvement, software enhancements).

5. Documentation, Procedure & Training

• Create and maintain standard operating procedures (SOPs) , maintenance procedures , and troubleshooting guides
• Document all events, alarms, interventions, and changes in the equipment history system (EHS/CMMS).
• Provide technical training and coaching to equipment technicians, junior engineers, and shift personnel.
• Ensure compliance with change management process for hardware, software, and recipe modifications.

6. Safety & Compliance

• Ensure all activities follow EHS regulations , company safety rules, and cleanroom protocols.
• Conduct and support risk assessments , LOTO procedures, and safety audits for gas, chemical, RF, and high‑voltage systems.
• Support compliance with ISO/Automotive/Quality Management Systems as applicable.

Job Requirements

• Bachelor's Degree in Electrical & Electronics Engineering, Materials Science Engineering, Chemical Engineering or equivalent
• Minimum 2 years of relevant Equipment / Field Service experience in Semiconductor area
• Familiar with Trymax, Axcelis, Gasonic or Mattson tools
• Proactive and adaptable, with strong learning agility and the ability to work independently with minimal supervision
• Good analytical and creative problem-solving skills with a keen eye to details
• High degree of interpersonal skills and able to work with cross-functional teams
• Knowledge of SPC, FMEA, 8D methodologies.